For example: Agilent E4440A or Anritsu 68369
Signal Generator 2.3 GHz -6.5 GHz
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Keysight / Agilent 8683B Overview
The 8683B Microwave Signal Generator covers the frequency range 2.3 to 6.5GHz. 5MHz resolution. Harmonics (<18GHz, 10 dBm): <25 dBc. AM depth: 0 to 70%. FM: ±5MHz. Pulse mod.: 10Hz to 1MHz in 5 ranges.