For example: Agilent E4440A or Anritsu 68369
Three-Path Diode Power Sensors
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Rohde and Schwarz NRP-Z22 Overview
The R&S®NRP-Z22 universal power sensor is, with a dynamic range of 90 dB for measurement of CW and modulated signals and a maximum power of +33 dBm, a very useful measurement instrument for a vast number of measurement tasks.