For example: Agilent E4440A or Anritsu 68369
Data Generator
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Stanford Research Systems CIS100 Overview
With better than 1 ppm detection limit, direct sampling at mTorr pressure, and a user-friendly Windows software package, the Stanford Research model CIS100 will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the point of use, high-vacuum residual gas analysis, and process equipment leak checking are some of the areas where this system will prove indispensable.