For example: Agilent E4440A or Anritsu 68369
Spectrum Analyzer, 50kHz to 21GHz
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Tektronix 492A Overview
The 492A Spectrum Analyzer offers calibrated amplitude and frequency coverage from 50kHz to 21GHz in coax, and to 325GHz using Tek's WM490 Series high performance waveguide mixers (not included). Center frequency accuracy is excellent; typically 1kHz at 100MHz, 10kHz at 10GHz and 40kHz at 40GHz. Negligible long term frequency drift ensures measurement repeatability. You get 100Hz resolution bandwidth to 220GHz and 1kHz resolution to 325GHz with high sensitivity and low phase noise.