For example: Agilent E4440A or Anritsu 68369
Thermal Inducing Vacuum Platform - 0°C to +200°C
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Temptronic TP03010B Overview
Outstanding Features:
- Wide Temperature range: 0° to +200°C
- DC Control System minimizes electrical noise
- Temperature Stability :±0.1°C
- Temperature Accuracy: ±0.5°C calibrated against transfer standard
- Advanced ThermoChuck Design:
- Low stray capacitance and high electrical resistance to ground: Surface Electrical Isolation: >109 ohms at 500 VDC between surface and ground at +25°C ; higher isolation configurations are available
- Superior chuck temperature uniformity: ±0.5°C or ±0.5% of set temperature
- Guarded ( low leakage) chuck configurations are optional
Standard Features:
- IEEE-488 or RS232 remote interface
- Proven high reliability
- ThermoChuck interfaces to most major standard and automatic wafer probing stations, laser trimmers and inspection stations
- No Liquid Nitrogen or CO2 is required for cooling.
- HCFC-free and CFC-free
- Certified Compliant
Applications:
- Thermal cycling and steady- state thermal testing of wafers, hybrids and other flat devices from 0°C to +200°C
- Moisture-free cold testing of wafers to 0°C with Controlled Environment Enclosure
- Low noise test applications
- High isolation and guarded ( low leakage) applications
- Thermal characterization of standard and high power devices