For example: Agilent E4440A or Anritsu 68369
ThermoChuck System (-65°/ +200°C)
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Temptronic TP3000A Overview
Probe your semiconductor wafers at high and low temperatures at the wafer probing station. Whether probing at high temperatures to +300°C or Moisture-free Cold Probing, Temptronic ThermoChucks are the most high precision, reliable chucks in the industry. Performing with exceptional temperature stability and uniformity across the entire chuck surface, ThermoChuck Systems make wafer testing at temperature simple and convenient.
ThermoChuck Systems are available in a variety of temperature ranges and configurations to meet your specific test requirements:
- -65° to +300°C
- Up to 300mm diameter
- Low noise, high isolation configurations available
- Available in configurations for most major (automatic and semi-automatic) probing stations