For example: Agilent E4440A or Anritsu 68369
Digital Ohmmeter
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Valhalla Scientific 4100ATC Overview
The 4100ATC Digital MicroOhmmeter uses 4-wire Kelvin measurements to achieve 0.02% of reading + 2 digit measurement accuracy. The 4100ATC has a 4.5 Digit LED display (20000 count) and 6 decade ranges spanning 200 milliOhms to 20 kOhms.